Research on vortex water ring vacuum pumps began in the late 1980s. In 1988, MorishitaE of the University of Tokyo in Japan developed a vertical self-transforming oil-lubricated vortex water ring vacuum pump with a pumping speed of 200L/min. Compared with the public transformation vortex vacuum pump, the radial clearance of the pump has the advantages of easy sealing and control. Compared with the rotary vane pump, the vortex pump has higher volumetric efficiency, and the vibration and noise levels in the pump are reduced. In addition, due to its more compact structure, the weight and volume of the whole machine are reduced by 12% and 40%, respectively. MorishitaE's research shows the high efficiency of scroll vacuum pumps, and proposes effective methods on how to eliminate clearance volume and control clearance. With the continuous expansion of the application of scroll vacuum pumps in the semiconductor industry, people have begun to devote themselves to the research of dry scroll vacuum pumps. The difference between dry scroll vacuum pumps and oil-lubricated scroll vacuum pumps is that the pump cavity does not contain any oil and liquid. Therefore, solving the problem of sealing and cooling in the pump is the key to the research of dry scroll vacuum pumps. In 1990, KushiroT developed a horizontal dry scroll vacuum pump with a pumping speed of 600L/min.

The ultimate pressure that the pump can achieve is 5 × 10-3T. It adopts water cooling to solve the problems of lubrication and cooling of various components in the pump. KushiroT's research shows the feasibility of dry scroll vacuum pumps, and also effectively solves the problems of mutual contact caused by thermal deformation of dynamic and static discs and vibration of moving discs caused by centrifugal force. Although the use of water cooling can effectively solve the cooling problem of dry scroll vacuum pumps, the setting of the cooling water circuit makes its structure more complicated. The plate adopts a double-sided vortex structure, and the spindle is equipped with two cooling fans, which are located at the ends of the two static plates respectively. When the spindle rotates, the fans rotate together to achieve the cooling effect on the vortex plate. At the same time, it adopts a semi-enclosed structure to solve the cooling problem of the motor. In 2001, Northeastern University of my country and Shenyang Scientific Instrument Development Center of Chinese Academy of Sciences jointly developed this type of dry scroll vacuum pump, which passed the appraisal of the National Vacuum Equipment Quality Inspection Center in early 2003. In addition, BOC has also launched a dry scroll vacuum pump that uses air cooling for cooling. The pump adopts a fully enclosed structure, the scroll plate is a single-sided scroll ring structure, and the cooling fan is installed at the end of the static plate.