Vacuum pump unit scroll pump has been widely used in many fields: ① Semiconductor industry: thin film manufacturing equipment, semiconductor device packaging equipment; ② Scientific instrument industry: synchrotron radiation beam of light machine, electron microscope, vacuum pump unit aurora test equipment, analysis and testing equipment; ③ Mechanical equipment industry: material preparation equipment, vacuum testing equipment, vacuum filtration equipment, material purification equipment, ultra-high vacuum exhaust equipment; ④ Medical equipment industry: dental instruments, dialysis machines; biological products industry: material purification and drug preparation; ⑤ Packaging industry: food, medicine, biological products and other packaging equipment; ⑥ Vacuum metallurgy industry: vacuum Furnaces, nano-material preparation equipment, vacuum testing equipment and other fields. The scroll pump is the best configuration for obtaining an oil-free vacuum system as a precursor pump for molecular pumps and small cryogenic pumps. Its main moving part has only one moving scroll plate, so the power transmission is simple. Under the same size, the moving radius is small, the parts are few, the structure is simple and compact, the size of the whole machine is small, the gap between the dynamic and static scroll discs, the moving disk and the pump cavity is small, and the moving parts in the pump have no friction with the pump cavity, so there is almost no wear, smooth operation, low power consumption, small gas flow loss, high working reliability, long life, easy maintenance, low maintenance cost and high volumetric efficiency. Air cooling, no water cooling required.

The scroll vacuum pump has a high compression ratio and a stable pumping speed in a wide pressure range. Since the change of the volume of the compression chamber is continuous, the driving torque changes little, the power changes little, and the vibration noise is low, which are not available in other types of dry vacuum pumps. In order to achieve the purpose of effective operation of the scroll pump, the scroll profile must be well meshed in each vacuum air chamber to avoid the deterioration of the force on the vortex wall due to factors such as the large pressure difference in the vacuum chamber, thermal deformation, the retention of a part of the high-pressure gas in the exhaust chamber and the reduction of the efficiency of the vacuum pump. Therefore, it is necessary to ensure the precise containment and engagement between the vortex profiles, control the leakage of the working medium, and achieve the purpose of pumping air. This is an important basis for the structural design of the scroll pump. In the pumping flow path of the pump, there is no need to use any oil and sealing liquid as the medium, and the suction cavity and the compression cavity are formed by the relative rotation of the dynamic and static scroll discs to discharge the pumped gas, and the suction, compression and exhaust processes are continuously completed. Therefore, how to prevent leakage and solve the problem of sealing is particularly important. The seal of the scroll pump mainly includes the radial seal of the axial meshing gap and the tangential seal of the radial meshing gap, that is, the tooth side seal.